AP 6120 / AP8120 - Microelectronic Materials and Processing
The lecture notes and viewgraphs prepared by Prof. Paul Chu are intended for the private use of students taking this course. They can be viewed using Acrobat Reader by clicking the chapter titles.
Prof. Paul K. Chu
Department of Physics & Materials Science
City University of Hong Kong
83 Tat Chee Avenue
Kowloon, Hong Kong
Tel: 852-34427724
Fax: 852-34420538
E-mail: paul.chu@cityu.edu.hk
Preface;
Viewgraphs
Chapter 1: Semiconductor
Materials and Physics; Viewgraphs
Chapter 2: Crystal Growth
and Preparation; Viewgraphs
Chapter 3: Epitaxy; Viewgraphs
Chapter 4: Oxidation; Viewgraphs
Chapter 5: Lithography; Viewgraphs
Chapter 6: Etching; Viewgraphs
Chapter 7: Polysilicon
and Dielectric Film Deposition; Viewgraphs
Chapter 8: Diffusion; Viewgraphs
Chapter 9: Ion
Implantation; Viewgraphs
Chapter 10: Metallization; Viewgraphs
Chapter 11: Testing,
Assembly, and Packaging; Viewgraphs