About ACARL News People Research & Publications Coating Technique Collaboration

• Coating Technique
• • PVD
  • CVD
  • Testing
• Equipment
• • Coating Equipment
  • Testing Equipment
• Projects
• • 2011 - 2013
  • 2006 - 2010
  • 2001 - 2005
  • 1994 - 2000

Multi-functional PVD deposition machine


Closed-field unbalanced magnetron sputtering


Monitoring system


Chemical vapor deposition