Synthesis and Device Fabrication
1500XC High Vacuum 3 Zone Tube Furnace
1700XC Low Vacuum Single Zone Tube Furnace
Photolithography System in Clean Room, Class 100
ULVAC Multi-chambers Deposition System in Clean Room, Class 1,000
ASTEX ECR Microwave Plasma CVD Chambers 1.5kW
ASTEX ECR Microwave Plasma CVD Chambers 5kW
1700XC Low Vacuum Single Zone Tube Furnace
UHV Thermal Evaporation System 1
UHV Magnetron Sputtering System
UHV Magnetron Sputtering System
Multi-Source Thermal Deposition System
RF Plasma-assisted hot filament CVD System
UHV Thermal Evaporation System 2
UHV Thermal Evaporation System 3
UHV Electron Beam Deposition System
