This course introduces the theoretical and practical aspects of electron-beam microanalysis based on modern electron microscopy techniques, including Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM) and X-Ray Energy Dispersive Spectroscopy (XEDS). The lectures cover vacuum system and instrumentations, basic electron optics, electron-beam and specimen interactions, electron diffraction, image formation and interpretation, generation of X-rays, qualitative X-ray microanalysis. The theoretical understanding gained by students will help them understand and interpret experimental data as well as perform electron microscopy experiments. Hands-on experience is also emphasized, which includes sample preparation techniques and use electron microscope(s).

For a student to pass the course, at least 30% of the maximum mark for both coursework and examination should be obtained.