SYE6207 - Characterization Techniques for Semiconductor Manufacturing | ||||||||||
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* The offering term is subject to change without prior notice | ||||||||||
Course Aims | ||||||||||
The course explores various techniques used in semiconductor manufacturing to assess the quality, performance, and reliability of devices. It emphasizes the significance of characterization in process control and yield enhancement. The course covers measurement techniques, statistical analysis, and metrology concepts. It discusses key techniques and explores reliability testing and failure analysis methods, including defect identification and failure mechanism analysis. Practical examples, case studies, and hands-on exercises offer real-world applications. By completing the course, students will gain an understanding of semiconductor characterization techniques, data interpretation, performance analysis, and their contribution to process optimization and yield improvement in the industry. | ||||||||||
Assessment (Indicative only, please check the detailed course information) | ||||||||||
Continuous Assessment: 60% | ||||||||||
Examination: 40% | ||||||||||
Examination Duration: 2 hours | ||||||||||
Detailed Course Information | ||||||||||
SYE6207.pdf | ||||||||||
Useful Links | ||||||||||
Department of Systems Engineering |