SYE6205 - Semiconductor Thin Film Engineering | ||||||||||
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* The offering term is subject to change without prior notice | ||||||||||
Course Aims | ||||||||||
Semiconductor Thin Film Engineering is an advanced course that explores principles, techniques, and applications of semiconductor thin films. It covers deposition methods (e.g., physical vapor deposition, chemical vapor deposition, atomic layer deposition, molecular beam epitaxy), characterization techniques, and properties and applications of thin films in devices like and integrated circuits and transistors as well as displays and solar cells. This course includes advanced topics like nanoscale thin film engineering and integration into complex device structures. It also addresses challenges such as defects, reliability, and process optimization. By course completion, students will have a strong foundation in semiconductor thin film engineering, enabling them to understand thin film technology in semiconductor applications. | ||||||||||
Assessment (Indicative only, please check the detailed course information) | ||||||||||
Continuous Assessment: 30% | ||||||||||
Examination: 70% | ||||||||||
Examination Duration: 2 hours | ||||||||||
Detailed Course Information | ||||||||||
SYE6205.pdf | ||||||||||
Useful Links | ||||||||||
Department of Systems Engineering |