Microchips are made in a series of precise manufacturing processes involving hundreds or thousands of repeated operations to fabricate interconnected multi-layer electronic components on the same wafer at the designed specification. The engineers who wish to develop their careers in the semiconductor fabrication plants should have the basic knowledge of the principles of semiconductor manufacturing and the capability to solve problems encountered in their future careers with the transport processes in the manufacturing.

This course aims to provide students with a solid understanding of the principles of semiconductor manufacturing, particularly on the fundamentals of involved transport processes. Lectures will be given with illustrative examples for enhancing the students' knowledge comprehension. Homework assignments will assist students in developing their skills to analyze the transport process problems in the manufacturing. In addition to the examination, students are required to learn through collaborative project sessions to improve their understanding of strategic thinking, problem-solving, team working, the relationships, and interactions between the fields of knowledge they have learned in this and other courses.

Continuous Assessment: 40%

Examination: 60%

Examination Duration: 2 hours

For a student to pass the course, at least 30% of the maximum mark for both coursework and examination should be obtained.