Department of Biomedical Engineering
City University of Hong Kong
Department of Biomedical Engineering

Micro Fabrication Laboratory (YEUNG-B1667)

YEUNG-B1667
Lab Overall View
Profilometer in action
Profilometer in action
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Application of Mask Aligner
Application of Mask Aligner
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This laboratory is equipped with a series of facilities such as Mask Aligner, Direct laser writer and Nano thermal/UV Imprint for dry photo lithography application. In addition, a Class 1000 clean booth is built when several fabrication equipment such as RIE, metal sputter, and 3D micro machine tools are equipped for fine and nano/micro fabrication applications.

Major Facility

  1. Bruker Dektak XT Profilometer
  2. Agilent 5500 AFM
  3. 3 Target Metal Sputter
  4. Oxford Plasma-Therm 790 RIE System
  5. Micro 3D Laser Cutting Machine
  6. CNI Compact Nano Imprint
  7. Class 1000 Clean booth
  8. Karl Suss MA6 double sized Mask Aligner
  9. Micro Scale Direct Laser Writer
Bruker Dektak 02 - Agilent 5500 AFM 03 - 3 Target Metal Sputter 04 - Plasma-Therm 790 RIE System 05 - Micro 3D Laser Cutting Machine 06 - CNI Compact Nano Imprint 07 - Class 1000 Clean booth 08 - Karl Suss MA6 double sized Mask Aligner 09 - Micro Scale Direct Laser Writer

Last modified on 23 October, 2020