The aim of this course is to provide students with the understanding of the functioning and construction of micro-sensors and micro-actuators integrated into micro electro mechanical systems (MEMS). Students will learn about design and fabrication fundamentals for MEMS, including the on-chip implementations for sensors and actuators of micron-scale dimensions. Apart from learning details of microstructure fabrication with the aid of microtooling, mechanics of silicon and thin-film materials will also be covered as well as principles of thermal micromechanics, electrostatic force, piezoresistivity, and capacitance-based detection of motion. Application examples will focus on micro-sensors (primarily of pressure and acceleration). Characteristics of some of these devices will be determined in laboratory experiments. Students will have the opportunity to discover and innovate in these domains.